Diaphragm structure and making method thereof

The invention provides a diaphragm structure. The diaphragm structure at least comprises a diaphragm supported over a monocrystalline silicon wafer and releasing holes formed along the periphery of the diaphragm. The invention further provides a pressure sensitive film structure based on the diaphragm structure. The pressure sensitive film structure comprises a beam-island structure, an outer frame, a film, releasing holes formed along the outer frame and releasing holes distributed on an island. Due to the fact that the releasing holes of the diaphragm structure do not penetrate through the whole diaphragm area, the integrity and symmetry of the diaphragm are guaranteed, the better mechanical performance is achieved, various structures can be freely designed in the middle of the diaphragm without being limited by the releasing holes, and the wider application space is achieved. Due to the fact that the pressure sensitive film structure is formed by partially etching and thinning the diaphragm structure, the condition of forming releasing holes in the delicate film area is avoided, and the reliability is improved while the mechanical performance is improved. Meanwhile, by means of the releasing holes in the island, the corrosion time is significantly shortened, and the finished product rate is significantly increased.