Sub-Terahertz Resonant Tunneling Diode Oscillators Integrated with Tapered Slot Antennas for Horizontal Radiation

This paper reports on the fabrication and oscillation characteristics of sub-terahertz resonant tunneling diode (RTD) oscillators integrated with tapered slot antennas for horizontal radiation. The device consists of a GaInAs/AlAs RTD and a resonator, waveguide, and tapered slot antenna on a semi-insulating InP substrate. The substrate under the tapered slot antenna was thinned to 20 µm to suppress radiation into the substrate. An oscillation frequency of 405 GHz and horizontal output power of 60 µW were observed at room temperature. A single-peak radiation pattern was obtained in the horizontal and vertical planes. The oscillation frequency, output power, and radiation pattern agreed well with theoretical analysis.