Deposition of smooth high-T c superconducting films with a solid-state YAG: Nd3+ laser

A method is presented for the deposition of smooth epitaxial high-T c superconducting films using a pulsed infrared YAG: Nd3+ laser and velocity filtration. This method is based on the removal of drops and solid particles from the flow of deposited substance with a fast shutter made of a rotating disk. The deposited smooth homogeneous YBa2Cu3O7−δ films have a critical temperature T c > 90 K. The surface concentration of drops is less than 3 × 102 cm−2, and their amount is decreased by more than six orders of magnitude.