High-frequency induction heating and plasma cvd device

By placing the heat-insulating fibrous material having reflection characteristics between the work coil and the body to be heated, by achieving the heat insulation effect suppresses the mutual radiation heat transfer, the mutual object to be heated and the work coil radiation reduce interference due to heat transfer. High-frequency induction heating apparatus, the heating mechanism using high frequency induction heating effect to be used in vacuum environments, supplied with high frequency power, a flat spiral work coil to heat by flowing an induced current in the heated portion by high frequency induction comprising, placing the heat-insulating fibrous material having reflection characteristics between the work coil and the heated portion.