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ALD-Grown Rare Earth Oxides for Advanced Gate Stacks
ALD-Grown Rare Earth Oxides for Advanced Gate Stacks
2008
S. Schamm
Pierre-Eugène Coulon
Shu Miao
Stelios N Volkos
L. H. Lu
Luca Lamagna
C. Wiemer
D. Tsoutsou
Giovanna Scarel
M. Fanciulli
Keywords:
Inorganic chemistry
Materials science
Optoelectronics
rare earth
gate stack
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