Rapid Chemical Vapor Deposition of Yba2cu3ox Coatings
1989
A rapid, controllable process for CVD of superconducting Yba2Cu30x has been developed. The new process relies on slowly feeding and pneumatically transporting powdered solid reagents directly into the CVD furnace; vaporizers are not used. Deposition rates two orders of magnitude greater than those achievable by reagent sublimation have been obtained using a powder feed mixture of Y, Ba, and Cu tmhd complexes (tmhd is tetramethylheptanedionate). Potentially, the process is applicable to thermally unstable, less volatile, lower cost reagents such as the acetylacetonates.
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