Rapid Chemical Vapor Deposition of Yba2cu3ox Coatings

A rapid, controllable process for CVD of superconducting Yba2Cu30x has been developed. The new process relies on slowly feeding and pneumatically transporting powdered solid reagents directly into the CVD furnace; vaporizers are not used. Deposition rates two orders of magnitude greater than those achievable by reagent sublimation have been obtained using a powder feed mixture of Y, Ba, and Cu tmhd complexes (tmhd is tetramethylheptanedionate). Potentially, the process is applicable to thermally unstable, less volatile, lower cost reagents such as the acetylacetonates.