Optimization of Lichtweggleichförmigkeit in inspection systems
2006
An inspection system includes an illumination source configured to illuminate a blazed phase grating sample image collection paths and an imaging system configured to capture an image of a sample point of the blazed phase grating sample and a controller that is configured to set the illumination source in response on an analysis of the image of the sample point for determining the illumination uniformity of the inspection system.
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