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Nanocoax arrays via NIL for high resolution sensing applications
Nanocoax arrays via NIL for high resolution sensing applications
2011
Binod Rizal
Patrick Jamieson
Svet Simidjiyski
Huaizhou Zhao
Dong Cai
Stephen Shepard
Thomas C. Chiles
Michael J. Naughton
Keywords:
Focused Impedance Measurement
Reactive-ion etching
Chemical-mechanical planarization
Analytical chemistry
Materials science
Relative humidity
Optoelectronics
high resolution
sensing applications
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