Old Web
English
Sign In
Acemap
>
Paper
>
A control-oriented self-consistent model of an inductively-coupled plasma
A control-oriented self-consistent model of an inductively-coupled plasma
2009
Bernard Keville
Miles M. Turner
Keywords:
Boltzmann equation
Boltzmann relation
First principle
Inductively coupled plasma
Computational chemistry
Plasma processing
Wave equation
Plasma diagnostics
Physics
Plasma modeling
Quantum mechanics
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]