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Fabrication of nanostructured Ti thin film with Ti deposition in He plasmas
Fabrication of nanostructured Ti thin film with Ti deposition in He plasmas
2021
Kazuya Miyaguchi
Shin Kajita
Hirohiko Tanaka
Noriyasu Ohno
Keywords:
Fabrication
Optoelectronics
Thin film
Materials science
Plasma
Deposition (law)
Correction
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