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Guidelines for the threshold voltage control of metal/HfSiON system(Session2: Silicon Devices I)
Guidelines for the threshold voltage control of metal/HfSiON system(Session2: Silicon Devices I)
2008
Akira Nishiyama
Yoshinori Tsuchiya
Masahiko Yoshiki
Atsuhiro Kinoshita
Junji Koga
Masato Koyama
Keywords:
Computer science
Metal gate
High-κ dielectric
Artificial intelligence
Machine learning
Work function
Electronic engineering
Negative-bias temperature instability
Threshold voltage
Silicon
Metal
Optoelectronics
Pattern recognition
Correction
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