Formation of an Array of Ordered Nanocathodes Based on Carbon Nanotubes by Nanoimprint Lithography and PECVD Processes

Technology for the production of an array of ordered nanoemitters based on carbon nanotubes is developed. The technological parameters of the fabrication of carbon nanotubes are chosen. It is shown that the structures produced exhibit field electron emission with an emission current of 8 μA and a threshold voltage of 80 V