Acquisition of the Surface Morphology of Ruled Gratings with a Microscope Objective

with a Microscope Objective Z.H. Li, L. Ma, C.X. Liu, M.N. Zhang, X.Y. Chen and C.F. Cheng College of Physics and Electronics, Shandong Normal University, Jinan 250014, China College of Physics and Electric Information, Dezhou University, Dezhou 253023, China College of Science, Qilu University Of Technology, Jinan 250353, China School of Physics and Technology, University of Jinan, Jinan 250022, China