Layered structure and a method of manufacturing the same, and, an ultrasonic transducer
2004
A multilayered structure which includes insulating layers and electrode layers and can be easily arrayed. The multilayered structure is manufactured by using a substrate on which first and second groups of columnar structures are arranged in a predetermined arrangement, and includes: a first electrode layer formed by forming a film of a conducting material on the substrate or an insulating layer except for portions around the first group of columnar structures; an insulating layer formed by spraying powder of an insulating material on the first electrode layer to deposit the powder thereon; a second electrode layer formed by forming a film of a conducting material on the insulating layer except for portions around the second group of columnar structures; and interconnections formed by filing, with a conducting material, holes formed by removing the columnar structures from the substrate.
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