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Preparation of Sr-Si film by RF magnetron sputtering method
Preparation of Sr-Si film by RF magnetron sputtering method
2018
Kodai Aoyama
Takao Shimizu
Hideto Kuramochi
Masami Mesuda
Ryo Akiike
Yoshisato Kimura
Hiroshi Funakubo
Keywords:
Sputter deposition
Analytical chemistry
Materials science
Optoelectronics
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