An integrated precise engineering for micro forming

An integrated precise engineering was proposed and developed to push the micro metal forming technology to higher level for manufacturing micro metallic devices in this study. A textured Diamond Liked Carbon (DLC) coating was applied to micro die for improving tribological performance. High-energy assisted processes, such as die-embedded localize heating and ultrasonic vibration systems were developed to improve formability of micro materials and accuracy of processes. The results show that .the integrated precise engineering solved the issues due to the size effects, and improved very much the tribological properties, formability of work materials and accuracy of product. Furthermore, the integrated precise engineering was applied in micro forming to manufacturing a micro metallic pump which realized commercialization.