A magnetic vector of magnetic nano-particle sensitive device and manufacturing method based on

2013 
The present invention relates to micro-magnetic sensors, in particular a magnetic vector of magnetic nano-particle sensitive device and a manufacturing method. The present invention solves the conventional micro-magnetic sensors not applicable to deep space, deep, measured magnetic field vector information is deep. A magnetic sensitive element based on vector magnetic particles comprise nano-SiO2 substrate, a lower metal electrode plates, magnetic material layer on the metal electrode plate; wherein the magnetic sensing layer of material is composed of N Fe3O4 nanoparticles layer and the polymer of N + 1 configured layers are alternately laminated, N being a positive integer; lower metal electrode plate laminated on the surface of the SiO2 substrate; magneto-sensitive material is laminated on the metal surface of the lower electrode plate; plate laminated on the metal electrode on the surface of the magneto-sensitive layer of material. The present invention is applicable to measurement of the magnetic field vector information for all occasions, especially for deep space, deep-sea, deep measured magnetic field vector of information.
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