Manufacture of 27 GB Read-Only-Memory Disc Using Deep-UV Beam Recorder with Two-Dimensional Optical Compensation

A novel mastering method using a deep-UV laser beam recorder (LBR) with two-dimensional optical compensation has been proposed. Using this technique, uniform fine pits can be created. The result reveals that a 27 GB read-only-memory (ROM) disc can be realized. The bottom jitter with a limit equalizer was 7.5%.