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Planarization of the Bottom YBCO Layer in the YBCO/ YSZ/ SiO_2/= YSZ/ YBCO Multilayer Structures
Planarization of the Bottom YBCO Layer in the YBCO/ YSZ/ SiO_2/= YSZ/ YBCO Multilayer Structures
1998
Weiang Luo
Hai-Jun Yao
Si-zhao Joe Qin
Seung-Hyun Yoo
Gregory J. Salamo
F.T. Chan
Dukyun Nam
W. D. Brown
Keywords:
Dielectric
Yttria-stabilized zirconia
Surface roughness
Sputter deposition
Chemical-mechanical planarization
Single crystal
Composite material
Electronic engineering
Materials science
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