Vibratory micromachined gyroscope

The utility model relates to a vibratory micromachined gyroscope, belonging to the technical field of an inertial sensor in a micro-electromechanical system. A driving mass block is fixed on the anchor point of the glass substrate of the micromachined gyroscope, and a detecting mass block and an isolation mass block are positioned in the driving mass block; the detecting mass block is fixed on the anchor point of the glass substrate of the micromachined gyroscope, and the isolation mass block as well as the driving mass block and the detecting mass block are oppositely fixed; detecting capacitance fixed electrodes and detecting capacitance movable electrodes are positioned in the detecting mass block, and the detecting capacitance fixed electrodes are fixed on the glass substrate of the micromachined gyroscope; the detecting capacitance movable electrodes and the detecting mass block are oppositely fixed, and driving capacitance movable electrodes and the driving mass block are oppositely fixed; and driving capacitance fixed electrodes are fixed on the glass substrate of the micromachined gyroscope. The micromachined gyroscope has the advantages of no mechanical coupling problems, complete elimination of the detection interference brought by mechanical coupling, improvement on the sensitivity of themechanical gyroscope, and easy mass production.