Device and method for detecting defects of spatial light modulator with sub-pixel structure

The invention provides a device and method for detecting the defects of a spatial light modulator with a sub-pixel structure. The device comprises a servo system, which is used to load/unload a spatial light modulator (SLM) and adjust the position and attitude of the SLM; a collecting system, which is used for collecting a series of patterns displayed by the SLM; and a processing system, wherein the processing system derives the image areas displayed by the SLM from the images taken by the collecting system, then carries out illumination compensation on the image areas displayed by the SLM, calculates the pixel average values and variance average values of a plurality of pixels in the image areas displayed by the SLM after illumination compensation, and judges whether the SLM has defect points or not according to the pixel average values and variance average values of the plurality of pixels. The provided device has the advantages of simpleness, quick detection speed, high precision, and low comprehensive cost.