Miniaturized Integrated Micro-Supercapacitors as Efficient Power Sources for Wearable and Biocompatible Electronic Devices

We present a novel approach to fabricate the biocompatible and stretchable micro-supercapacitors (MSCs) as energy storage units in electronic devices. The interdigital micro-patterns were embedded into polydimethylsiloxane (PDMS) substrate via a combination of microelectronic fabrication techniques. Graphene, as a biocompatible form of carbon, was used as the electrode material due to its high electrical conductivity, large surface area, and excellent mechanical strength. The integrated MSC delivered a high stack capacitance of 1.95 F/cm3, excellent rate performance, and unique cycling stability (