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Towards Real Time Effective Dimensional Verification of High Throughput Nano-Embossing Manufacturing
Towards Real Time Effective Dimensional Verification of High Throughput Nano-Embossing Manufacturing
2016
Matteo Calaon
P. Chamberlain
Morten Madsen
D. Hardt
Guido Tosello
Hans Nørgaard Hansen
Keywords:
Nano-
Real-time computing
Electronic engineering
Throughput
Embossing
Materials science
Computer science
Nanotechnology
Correction
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