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Mems sensor and manufacturing method thereof
Mems sensor and manufacturing method thereof
2012
gi takasi utu
tooru miyatake
ken'itirou ikeda
Xindachuan Shang
tosihiro kobayasi
takahasi tooru
tooru takahasi
Shizejiu Xing
jiuxingshize
kikuiri katuya
katuya kikuiri
Keywords:
Microelectromechanical systems
Electronic engineering
Materials science
Electrical engineering
mems sensors
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