Silicon coating on ferritic steels by CVD-FBR technology

Abstract Silicon protective coatings were deposited on ferritic steels (9–12% Cr) by chemical vapour deposition by means of fluidized bed reactor (CVD-FBR). The process was performed at temperatures below 580 °C with the use of Silicon donator powder and hydrogen chloride (HCl) of activator. Thermodynamic calculations were made before the experimental study to investigate the conditions for the formation of gas precursors for the deposition of the Si coating. The samples were examined by means of optical microscopy (OM), Scanning Electron Microscopy (SEM), Energy Dispersion Spectroscopy (EDS) as well as X-ray diffraction, and the results, show the formation of dense, homogenous and thin coatings consisting of Fe 3 Si.