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Plasma-enhanced atomic layer deposition of GaP/GaN digital alloys
Plasma-enhanced atomic layer deposition of GaP/GaN digital alloys
2021
A. V. Uvarov
A. S. Gudovskikh
Artem Baranov
I. A. Morozov
D. A. Kudryashov
Keywords:
Optoelectronics
Plasma
Atomic layer deposition
Materials science
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