Pyroelectric sensor arrays on silicon

Abstract The principles and materials employed for the construction of pyroelectric sensor arrays on Si are reviewed. When a pyroelectric sensor forms part of an array on a Si-substrate, its charge must be coupled into the read-out electronics integrated into the Si-substrate. The electrical coupling is accompanied by thermal coupling to the substrate as a heat sink, which results in a reduction of the sensitivity. Criteria for the evaluation of the performance of a sensor in an array and its limitations are discussed.