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Ultra-fast fabrication of (110)-oriented beta-SiC wafer by halide CVD
Ultra-fast fabrication of (110)-oriented beta-SiC wafer by halide CVD
2016
Rong Tu
Dingheng Zheng
Qingyun Sun
Mingxu Han
Song Zhang
Zhiying Hu
Takashi Goto
Lianmeng Zhang
Keywords:
Halide
Wafer
Composite material
Materials science
Optoelectronics
ultra fast
Fabrication
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