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Low-temperature aluminium oxide deposition using the extending thermal plasma technique : film properties and applications
Low-temperature aluminium oxide deposition using the extending thermal plasma technique : film properties and applications
2006
I. Volintiru
Jl Hans van Hemmen
M Adriana Creatore
Mcm Richard van de Sanden
Keywords:
Thermal
Aluminium oxide
Plasma
Plasma processing
Metallurgy
Materials science
Deposition (law)
Correction
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