Old Web
English
Sign In
Acemap
>
Paper
>
Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications
Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications
2018
Katarzyna Oleśko
H. Szymanowski
M. Gazicki-Lipman
Jacek Balcerzak
Witold Szymań Ski
Wojciech Pawlak
Anna Sobczyk-Guzenda
Keywords:
Composite material
Optical filter
Optoelectronics
Materials science
Plasma-enhanced chemical vapor deposition
Nanomaterials
Refractive index
Adhesion
Correction
Source
Cite
Save
Machine Reading By IdeaReader
46
References
1
Citations
NaN
KQI
[]