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Improving the precision of the methods for vibration acceleration measurement using micromechanical capacitive accelerometers
Improving the precision of the methods for vibration acceleration measurement using micromechanical capacitive accelerometers
2021
V.F. Hraniak
V. V. Kukharchuk
Z. Omiotek
P. Drozdziel
O. Mamyrbaev
B. Imanbek
Keywords:
Acoustics
vibration acceleration
Materials science
Accelerometer
Capacitive sensing
Correction
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