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Electromagnetic Effect on Plasmas in Rectangular Very High Frequency Capacitively Coupled Plasma Source
Electromagnetic Effect on Plasmas in Rectangular Very High Frequency Capacitively Coupled Plasma Source
2018
Kallol Bera
Shahid Rauf
Kenneth S. Collins
Keywords:
Capacitively coupled plasma
Plasma
Analytical chemistry
Physics
very high frequency
Atomic physics
Correction
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