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Balanced Electrostatic All-Silicon MEMS Speakers
Balanced Electrostatic All-Silicon MEMS Speakers
2020
H. Schenk
Lutz Ehrig
Franziska Wall
Bert Kaiser
Michael Stolz
Sergiu Langa
David Schuffenhauer
Jorge Mario Monsalve Guaracao
Anton Melnikov
Holger Conrad
Keywords:
Microelectromechanical systems
Materials science
Silicon
Optoelectronics
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