Properties of nonthermal capacitively coupled plasmas generated in narrow quartz tubes for synthesis of silicon na-noparticles

Results from a computational investigation of the fundamental properties of plasma synthesis of silicon nanocrystals (SNCs) using the 2-dimensional hybrid plasma equipment model (HPEM) were discussed. The model reactor comprised quartz tube excited by the two ring electrodes at 25 MHz. Most of SiH 4 dissociated in transitioning through the plasma zone. The dissociation products produced mostly Si 2 H 6 , SiH 3 , and SiH 2 on the exit.