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Epitaxial growth of Al[sub 2]O[sub 3] thin films on Si(100) using ionized beam deposition
Epitaxial growth of Al[sub 2]O[sub 3] thin films on Si(100) using ionized beam deposition
2001
S. W. Whangbo
Y. G. Choi
Kwun-Bum Chung
Ho-Keun Jang
Chung Nam Whang
Keywords:
Thin film
Ionization
Beam (structure)
Epitaxy
Chemistry
Inorganic chemistry
Correction
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