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Synthesis, nanoindentation and AFM studies of CVD boron carbon nitride films
Synthesis, nanoindentation and AFM studies of CVD boron carbon nitride films
2005
Marina Kosinova
N. I. Fainer
V. S. Sulyaeva
Yu. M. Rumyantsev
Fedor A. Kuznetsov
E. A. Maximovskii
Z. Cao
Masami Terauchi
K Shibata
F. Satoh
Keywords:
Boron
Nanoindentation
Chemical engineering
Atomic force microscopy
Carbon nitride
Materials science
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