STRESS ANALYSIS OF (001) PREFERRED ORIENTED BiFeO3 AND Bi(Cr0.03Fe0.97)O3 FILMS

ABSTRACT Comparative stress analysis of (001)-preferred oriented BiFeO3 (BFO) and Bi(Cr0.03Fe0.97)O3 (BCF) films formed by the chemical solution deposition method on LaAlO3 and La0.27Sr0.73Ta0.35AlO3 substrates, using high resolution X-ray diffraction (HRXRD), sin2ψ method, micro-Raman and high resolution transmission electron microscopy (HRTEM) was carried out. Tensile stresses are found in all films compared to the compressive stresses measured by HRTEM. Compressive stresses occur at the interface due to lattice mismatch between the substrates and BFO/BCF. The BFO films contained higher tensile stresses ∼8.57 GPa than the BCF films ∼5.20 GPa. Intrinsic stresses played a larger factor in the residual stress of the films.