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A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors
A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors
2017
Motohiro Takayasu
Keywords:
Inertial measurement unit
Capacitive sensing
Optoelectronics
Microelectromechanical systems
Relaxation oscillator
Materials science
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