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Model for Deposition of Thin Films in Plasma CVD
Model for Deposition of Thin Films in Plasma CVD
1993
Tomoaki Hino
I. Fujita
Toshiro Yamashina
Noriaki Ueda
Naoto Asami
Masana Nishikawa
Keywords:
Thin film
Plasma
Combustion chemical vapor deposition
Carbon film
Plasma processing
Inorganic chemistry
Materials science
Chemical engineering
Deposition (law)
Correction
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