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ANKA, a customer-oriented synchrotron radiation facility for microfabrication and analytical services
ANKA, a customer-oriented synchrotron radiation facility for microfabrication and analytical services
1998
Gernot Buth
Stephen Doyle
D. Einfeld
M. Hagelstein
S. Hermle
E. Huttel
A Krüssel
Martin Lange
Y.-L. Mathis
W. Mexner
Herbert O. Moser
E. Pellegrin
U. Ristau
R. Rossmanith
J. Schaper
H. Schieler
Herbert A. Simon
Ralph Steininger
Stefan Voigt
Herbert Walther
Francisco Macia Perez
M. Pont
M. Pleško
Keywords:
Synchrotron radiation
Microfabrication
Storage ring
Optoelectronics
Infrared
Materials science
Insertion device
Correction
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