Model for hydrogen accumulation in co-deposited layers

Abstract An improved diffusion based model for prediction of the hydrogen content in co-deposited layers depending on the deposition conditions (the properties of the material which is co-deposited with hydrogen, rate of deposition, hydrogen flux and particle energy, substrate temperature) is presented. The model is validated using experimental data for W, Mo and Al, and is compared to empirical scaling equations currently in use. It is shown that a good agreement is observed in regards to hydrogen content vs substrate temperature experimental data, and no disagreement with scaling equations can be seen in regards to the role of hydrogen flux and the rate of deposition. It is shown that the influence of hydrogen particle energy on the hydrogen content requires further investigation. In addition to hydrogen, models for other mobile impurities both in co-deposited layers and in layers under steady-state net erosion conditions are given.