Temperature characteristics of a magnetic micro strain gauge

Magnetoelastic strain gauges applied in weighing machines enable a high resolution excursion measurement. Micro transformers with one part of the flux guide made out of a magnetoelastic material allow the fabrication of magnetic micro systems with high k -factors. The sensors were fabricated with Micro Electro-mechanical Systems (MEMS) technology on silicon substrates. A thinning process before integration into components is required. The thinned sensor chips were integrated into an articulated suspension. For these susceptible sensor elements, special requirements to the assembly process exist. Since the temperature dependence of such systems is of great interest, an evaluation of the temperature characteristics was subject of investigations. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)