Metal catalyst enhanced growth of high quality and density GaN dots on Si(111) by implant source growth

Using ion implantated material as a growth source, implant source growth, is an alternative growth method where ion implanted atoms diffuse to the surface and can be used to form nanostructures. By introducing a small amount of a steel based contaminate we were able to grow high quality and high density GaN nanodots on Si(111) which showed strong excitonic UV luminescence. Furthermore by varying the implanted Ga dose and annealing conditions, the size of the nanodots can be controlled. This method for producing GaN nanostructures may be useful for optical or electronic device applications. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)