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LARGE-SCALE GROWTH OF GALLIUM ARSENIDE EPITAXIAL LAYERS BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION
LARGE-SCALE GROWTH OF GALLIUM ARSENIDE EPITAXIAL LAYERS BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION
1985
J.L. Tandon
Y.C.M. Yeh
Keywords:
Chemical vapor deposition
Hybrid physical-chemical vapor deposition
Gallium
Combustion chemical vapor deposition
Epitaxy
Gallium arsenide
Epiwafer
Metal
Inorganic chemistry
Chemistry
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