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An Improved Micro-Fabrication Technique for Aluminum Electrodes of Surface Acoustic Wave Transducers
An Improved Micro-Fabrication Technique for Aluminum Electrodes of Surface Acoustic Wave Transducers
1976
Kiyoshi Asakawa
Katsuhiko Nishikawa
Keywords:
Electrode
Electronic engineering
Surface acoustic wave
Transducer
Acoustics
Materials science
aluminum electrode
surface acoustic wave transducers
micro fabrication
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