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Effect of Al2O3layer on leakage current properties for DRAM capacitor with ZrO2/Al2O3/ZrO2multilayer
Effect of Al2O3layer on leakage current properties for DRAM capacitor with ZrO2/Al2O3/ZrO2multilayer
2016
Onaya Takashi
Nabatame Toshihide
Sawada Tomomi
Kurishima Kazunori
Sawamoto Naomi
Ohi Akihiko
Chikyo Toyohiro
Ogura Atsushi
Keywords:
Capacitor
Leakage (electronics)
High-κ dielectric
Electronic engineering
Dram
Materials science
Optoelectronics
dram capacitor
Correction
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