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Chemical composition and local atomic structure of ultrathin surface layers after implantation of argon and oxygen ions
Chemical composition and local atomic structure of ultrathin surface layers after implantation of argon and oxygen ions
2020
I K Averkiev
O. R. Bakieva
A. A. Kolotov
D. V. Surnin
V. V. Kriventsov
Keywords:
Argon
Materials science
oxygen ions
Atom
Chemical composition
Inorganic chemistry
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