Dipole antenna and distributed MEMS phase shifter fully integrated in a single wafer process for beam steering applications

This paper reports on the design and fabrication of a fully integrated antenna beam steering concept for airborne applications at 17GHz. The system is based on a single wafer process including a dipole antenna, a balun and a 2-bit distributed MEMS phase shifter (in a 7x3mm high-resistivity-silicon dice). To our knowledge, it is the first time that such integration has been done. First results of individual devices are reported and simulations of the whole concept are originally presented.