High fill-factor multilevel Fresnel zone plate arrays by femtosecond laser direct writing

Abstract Fresnel zone plate arrays (FZPAs), as a kind of an important integrated micro-optical device, have attracted great attention. However, the fill factor of present FZPAs by femtosecond technology is a little low, which leads to serious light loss and low signal-to-noise. Here we reported high fill-factor square and hexagonal FZPAs by femtosecond laser two-photon polymerization of the resin SU-8. Their optical focusing and imaging properties showed the high uniformity and high fidelity of these FZPAs. Moreover, 100% fill-factor FZPAs were demonstrated by optimal theoretical design and experimental parameters. With this high quality FZPAs, clear imaging “F” was obtained. At last, high-level phase type FZPAs were prepared to further enhance the diffractive efficiency to as much as 75%.