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Experimental study on removal of antireflection sol-gel SiO2 coating of fused silica assisted by ion beam etching
Experimental study on removal of antireflection sol-gel SiO2 coating of fused silica assisted by ion beam etching
2021
Yaoyu Zhong
Ci Song
Dai Yifan
Shi Feng
Xiaodong Zhang
Keywords:
Coating
ion beam etching
Chemical engineering
Sol-gel
Materials science
Correction
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